LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F.; Thürigen, C.
MetadatenAuthor: | Klaus-Peter Kämper, B. Hagemann, H. Lehr, F. Michel |
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Parent Title (English): | LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed. |
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Publisher: | FSRM |
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Place of publication: | Neuchatel |
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Document Type: | Article |
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Language: | English |
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Year of Completion: | 1995 |
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Length: | S. a - c, 139 S.; Ill., graph. Darst. |
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First Page: | 100 |
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Last Page: | 110 |
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Note: | University Enterprise Training Partnership for Micro-Electro-Mechanical Systems |
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Institutes: | FH Aachen / Fachbereich Maschinenbau und Mechatronik |
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