MetadatenAuthor: | Klaus-Peter Kämper, J. Döpper, W. Ehrfeld, S. Oberbeck |
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ISBN: | 078034412X |
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Parent Title (English): | Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division |
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Publisher: | IEEE Service Center |
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Place of publication: | Piscataway, NJ |
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Document Type: | Article |
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Language: | English |
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Year of Completion: | 1998 |
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Length: | XXX, 660 S. |
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First Page: | 432 |
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Last Page: | 437 |
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Note: | International Workshop on Micro-Electro-Mechanical Systems <11, 1998, Heidelberg> |
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Link: | http://dx.doi.org/10.1109/MEMSYS.1998.659796 |
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Zugriffsart: | bezahl |
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Institutes: | FH Aachen / Fachbereich Maschinenbau und Mechatronik |
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