Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays
Author: | F. Faßbender, G. Schmitt, Michael Josef SchöningORCiD, H. Lüth, G. Buß, J. W. Schultze |
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ISBN: | 0925-4005 |
Parent Title (English): | Sensors and Actuators B. 68 (2000), H. 1-3 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2000 |
First Page: | 128 |
Last Page: | 133 |
Link: | http://dx.doi.org/10.1016/S0925-4005(00)00472-X |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien |