MetadatenAuthor: | Holger HeuermannORCiD, A. Rumiantsev, S. Schott |
---|
ISBN: | 0-7803-8371-0 |
---|
Parent Title (English): | On wafer characterization : 63rd ARFTG conference digest, spring 2004, 11 June 2004, Fort Worth, TX / Automatic RF Techniques Group. [Conference chair: John Cable. Publication chair: J. G. Burns] |
---|
Publisher: | IEEE Operations Center |
---|
Place of publication: | Piscataway, NJ |
---|
Document Type: | Article |
---|
Language: | English |
---|
Year of Completion: | 2004 |
---|
Length: | X, 227 S : Ill., graph. Darst. |
---|
First Page: | 91 |
---|
Last Page: | 96 |
---|
Note: | Microwave Theory and Techniques Society. ; Automatic RF Techniques Group ; ARFTG conference ; (63 : ; 2004.06.11 : ; Fort Worth, Tex.) |
---|
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |
---|