Preparation of patterned GaAs structures for MEMS and MOEMS. Cambel, V.; Kicin, S.; Kuliffayová, M.; Kovácová, E.; Novák, J.; Kostic, I.; Förster, A.
Author: | Arnold Förster, V. Cambel, S. Kicin, M. Kuliffayová |
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ISBN: | 0928-4931 |
Parent Title (English): | Materials Science and Engineering: C. 19 (2002), H. 2 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2002 |
First Page: | 161 |
Last Page: | 165 |
Link: | http://dx.doi.org/10.1016/S0928-4931(01)00476-3 |
Zugriffsart: | bezahl |
Institutes: | FH Aachen / Fachbereich Energietechnik |