High-rate sputtering of zinc oxide with a funnel-shaped magnetic field: Effect of the target thickness on the layer properties
Author: | Andreas Mohnke |
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ISBN: | 0042-2266 |
Parent Title (English): | Vakuum-Technik. 36 (1987), H. 5 |
Document Type: | Article |
Language: | English |
Year of Completion: | 1987 |
First Page: | 148 |
Last Page: | 151 |
Note: | unter 63 ZS 073-1986/87 in der Bibliothek Jülich vorhanden |
Institutes: | FH Aachen / Fachbereich Energietechnik |