Biochemical sensors with structured and porous silicon capacitors
Author: | H. Lüth, M. Thust, A. Steffen, P. Kordos, Michael Josef SchöningORCiD |
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ISBN: | 0921-5107 |
Parent Title (English): | Materials Science and Engineering B. 69-70 (2000) |
Document Type: | Article |
Language: | English |
Year of Completion: | 2000 |
First Page: | 104 |
Last Page: | 108 |
Link: | http://dx.doi.org/10.1016/S0921-5107(99)00275-5 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien |