Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C.
Author: | Klaus-Peter Kämper, W. Ehrfeld, V. Hessel, M. Lacher |
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ISBN: | 0-7803-3664-X |
Parent Title (English): | Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1 |
Publisher: | IEEE Service Center |
Place of publication: | Piscataway, NJ |
Document Type: | Article |
Language: | English |
Year of Completion: | 1997 |
Length: | XVI, 438 S. |
First Page: | 71 |
Last Page: | 79 |
Link: | http://dx.doi.org/10.1109/ICMEL.1997.625185 |
Zugriffsart: | bezahl |
Institutes: | FH Aachen / Fachbereich Maschinenbau und Mechatronik |