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Implication of the light polarisation for UV curing of pre-patterned resists

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Author:M. Wissen, N. Bogdanski, H.-C. Scheer, Andreas Bitz, G. Ahrens, G. Gruetzner
DOI:https://doi.org/10.1016/j.mee.2004.12.099
ISSN:0167-9317
Parent Title (English):Microelectronic Engineering
Document Type:Article
Language:English
Year of Completion:2005
Date of the Publication (Server):2017/04/10
Volume:78-79
First Page:659
Last Page:664
Institutes:FH Aachen / Fachbereich Elektrotechnik und Informationstechnik