Capacitive microsensors for biochemical sensing based on porous silicon technology
Author: | Michael Josef SchöningORCiD, M. Thust, P. Kordos, J.W. Schultze, H. Lüth |
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Parent Title (English): | Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek |
Publisher: | Elsevier |
Place of publication: | Amsterdam [u.a.] |
Document Type: | Article |
Language: | English |
Year of Completion: | 2000 |
First Page: | 1184 |
Last Page: | 1187 |
Note: | International Conference on Solid State Sensors and Actuators <10, 1999, Sendai, Miyagi-ken> ; Transducers '99 ; (10 : ; 1999.06.07-10 : ; Sendai) |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |