Reduction of geometric taper losses in the PCVD process. Geittner, P.; Hagemann, H. J.; Warnier, J.; Weling, F.; Wilson, H.
Author: | Hans-Jürgen Hagemann, P. Geittner, J. Warnier, F. Weling |
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ISBN: | 0013-5194 |
Parent Title (English): | Electronics letters : an intern. publication / The Institution of Electrical Engineers. 21 (1985), H. 13 |
Document Type: | Article |
Language: | English |
Year of Completion: | 1985 |
First Page: | 870 |
Last Page: | 871 |
Link: | http://dx.doi.org/10.1049/el:19850614 |
Zugriffsart: | bezahl |
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |