Diamond chemical vapor deposition: gas compositions and film properties / Bachmann, P.K.; Hagemann, H.-J.; Lade, H; Leers, D.; Picht, F.; Wiechert, D.U.; Wilson, H.
MetadatenAuthor: | Hans-Jürgen Hagemann, Peter K. Bachmann, H. Lade, D. Leers |
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ISBN: | 1-55899-239-1 |
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Parent Title (English): | Diamond, SiC and nitride wide bandgap semiconductors : symposium held April 4 - 8, 1994, San Francisco, California, U.S.A. / ed.: Calvin H. Carter, Jr. ... |
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Place of publication: | Pittsburgh, Penn. |
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Document Type: | Article |
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Language: | English |
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Year of Completion: | 1994 |
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Length: | XV, 760 S. : Ill., graph. Darst. |
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First Page: | 267 |
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Last Page: | 277 |
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Note: | Materials Research Society symposium proceedings ; 339 |
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Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |
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