Amorphous silicon as semiconductor material for high resolution LAPS
Author: | Werner Moritz, Tatsuo Yoshinobu, Friedhelm Finger, Steffi Krause, Michael Josef SchöningORCiD |
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Parent Title (English): | Eurosensors XVII : the 17th European Conference on Solid-State Transducers ; University of Minho, Guimarães, Portugal, September 21 - 24, 2003 |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2003 |
First Page: | 48 |
Last Page: | 49 |
Link: | http://repositorium.sdum.uminho.pt/bitstream/1822/4837/1/BookOfAbstractsFinal.pdf |
Zugriffsart: | weltweit |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien |