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Gas sensor investigation based on a catalytically activated thin-film thermopile for H2O2 detection
(2010)
Enzyme und Biosensorik
(2018)
Enzymbasierte Biosensoren finden seit mehr als fünf Jahrzehnten einen prosperierenden Wachstumsmarkt und werden zunehmend auch in biotechnologischen Prozessen eingesetzt. In diesem Kapitel werden, ausgehend vom Sensorbegriff und typischen Kenngrößen für Biosensoren (Abschn. 18.1), elektrochemische Enzym-Biosensoren vorgestellt und deren typischen Einsatzgebiete diskutiert (Abschn. 18.2). Ein Blick über den „Tellerrand“ hinaus zeigt alternative Transduktorprinzipien (Abschn. 18.3) und führt abschließend in aktuelle Forschungstrends ein (Abschn. 18.4).
Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.
Miniaturised reference electrodes for field-effect sensors compatible to silicon chip technology
(2005)
Miniaturisierte Referenzelektroden in Siliziumtechnologie für elektrochemische Sensoranwendungen
(2004)
Strategies of miniaturised reference electrodes integrated in a silicon-based „one chip“ pH sensor
(2003)
The ideal combination among biomolecules and nanomaterials is the key for reaching biosensing units with high sensitivity. The challenge, however, is to find out a stable and sensitive film architecture that can be incorporated on the sensor’s surface. In this paper, we report on the benefits of incorporating a layer-by-layer (LbL) nanofilm of polyamidoamine (PAMAM) dendrimer and carbon nanotubes (CNTs) on capacitive electrolyte-insulator-semiconductor (EIS) field-effect sensors for detecting urea. Three sensor arrangements were studied in order to investigate the adequate film architecture, involving the LbL film with the enzyme urease: (i) urease immobilized directly onto a bare EIS [EIS-urease] sensor; (ii) urease atop the LbL film over the EIS [EIS-(PAMAM/CNT)-urease] sensor; and (iii) urease sandwiched between the LbL film and another CNT layer [EIS-(PAMAM/CNT)-urease-CNT]. The surface morphology of all three urea-based EIS biosensors was investigated by atomic force microscopy (AFM), while the biosensing abilities were studied by means of capacitance–voltage (C/V) and dynamic constant-capacitance (ConCap) measureaments at urea concentrations ranging from 0.1 mM to 100 mM. The EIS-urease and EIS-(PAMAM/CNT)-urease sensors showed similar sensitivity (∼18 mV/decade) and a nonregular signal behavior as the urea concentration increased. On the other hand, the EIS-(PAMAM/CNT)-urease-CNT sensor exhibited a superior output signal performance and higher sensitivity of about 33 mV/decade. The presence of the additional CNT layer was decisive to achieve a urea based EIS sensor with enhanced properties. Such sensitive architecture demonstrates that the incorporation of an adequate hybrid enzyme-nanofilm as sensing unit opens new prospects for biosensing applications using the field-effect sensor platform.