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Klaus-Peter Kämper (52)
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virtual clean room
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Fachbereich Maschinenbau und Mechatronik (52)
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Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; Kämper, K.-P.; Schütze, A.; Wallach, D.; Walter, T.
(2006)
Klaus-Peter Kämper
;
A. Picard
;
A. Schütze
;
D. Wallach
A self-filling low-cost membrane micropump
(1998)
Klaus-Peter Kämper
;
J. Döpper
;
W. Ehrfeld
;
S. Oberbeck
51
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52