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Institute
- Fachbereich Medizintechnik und Technomathematik (205) (remove)
Handheld measurement device for field-effect sensor structures: Practical evaluation and limitations
(2007)
Penicillin detection by means of field-effect based sensors: EnFET, capacitive EIS sensor or LAPS?
(2000)
An ISFET-based penicillin sensor with high sensitivity, low detection limit and long lifetime
(2001)
Penicillin detection by means of field-effect based sensors: EnFET, capacitive EIS sensor or LAPS?
(2001)
Novel concepts for flow-rate and flow-direction determination by means of pH-sensitive ISFETs
(2001)
Application of a (bio-)chemical sensor (ISFET) for the detection of physical parameters in liquids
(2003)
Online-Messsysteme für die automatisierte Charakterisierung von feldeffektbasierten Biosensoren
(2007)
A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.