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Author
Kämper, Klaus-Peter
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Picard, A.
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Schütze, A.
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Wallach, D.
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2006
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Fachbereich Maschinenbau und Mechatronik
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Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; Kämper, K.-P.; Schütze, A.; Wallach, D.; Walter, T.
(2006)
Kämper, Klaus-Peter
;
Picard, A.
;
Schütze, A.
;
Wallach, D.
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