Refine
Year of publication
Institute
- INB - Institut für Nano- und Biotechnologien (193) (remove)
Document Type
- Article (162)
- Conference Proceeding (22)
- Part of a Book (8)
- Book (1)
Keywords
- Label-free detection (3)
- capacitive field-effect sensor (3)
- tobacco mosaic virus (TMV) (3)
- Biosensor (2)
- Capacitive field-effect sensor (2)
- Tobacco mosaic virus (TMV) (2)
- field-effect sensor (2)
- gold nanoparticles (2)
- (Bio)degradation (1)
- Biosensorik (1)
- CNOT (1)
- Capacitive field-effect (1)
- Capacitive model (1)
- Chemical imaging (1)
- Coat protein (1)
- C–V method (1)
- DNA biosensor (1)
- Electrolyte–insulator–semiconductor (1)
- Enzyme coverage (1)
- Enzyme logic gate (1)
- Enzyme nanocarrier (1)
- Field effect (1)
- Field-effect biosensor (1)
- Field-effect device (1)
- Field-effect sensor (1)
- Glucose biosensor (1)
- Glucose oxidase (1)
- Gold nanoparticles (1)
- ISFET (1)
- Impedance spectroscopy (1)
- LAPS (1)
- Layer-by-layer adsorption (1)
- Light-addressable potentiometric sensor (1)
- Multianalyte detection (1)
- Multicell (1)
- Multiplexing (1)
- Nanostructuring (1)
- Penicillin (1)
- Plant virus (1)
- Poly(allylamine hydrochloride) (1)
- Poly(d,l-lacticacid) (1)
- Potentiometry (1)
- Real-time monitoring (1)
- TMV adsorption (1)
- Ta₂O₅ gate (1)
- Tobacco mosaic virus (1)
- Wafer (1)
- XOR (1)
- Zeta potential (1)
- acetoin (1)
- aminooctanethiol (1)
- atomic layer deposition (1)
- bi-enzyme biosensor (1)
- biosensor (1)
- capacitive EIS sensor (1)
- capacitive field-effect biosensor (1)
- capacitive field-effect sensors (1)
- capacitive model (1)
- capillary micro-droplet cell (1)
- control gate (1)
- detection of charged macromolecules (1)
- electrolyte-insulator-semiconductor capacitors (1)
- enzyme cascade (1)
- enzyme immobilization (1)
- enzyme-logic gate (1)
- equivalent circuit (1)
- glucose oxidase (GOx) (1)
- horseradish peroxidase (HRP) (1)
- layer expansion (1)
- multianalyte detection (1)
- nanoparticle coverage (1)
- on-chip integrated addressable EISCAP sensors (1)
- pH sensors (1)
- pattern-size reduction (1)
- penicillinase (1)
- plant virus detection (1)
- polystyrene sulfonate (1)
- self-aligned patterning (1)
- turnip vein clearing virus (TVCV) (1)
- ultrathin gate insulators (1)
- urease (1)
- wafer-level testing (1)
Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
(2006)
A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.
A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.
Novel concepts for flow-rate and flow-direction determination by means of pH-sensitive ISFETs
(2001)