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Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors
(1995)
Schöning, Michael Josef
;
Schaub, A.
;
Zundel, A.
;
Beckers, Leah
;
Schubert, J.
;
Zander, W.
;
Kordos, P.
;
Lüth, H.
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