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Author
Prume, Klaus
(6)
Booij, W. E.
(2)
Calame, F.
(2)
Raeder, H.
(2)
Tyholdt, F.
(2)
Calame, Florian
(1)
Muralt, P.
(1)
Muralt, Paul
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Schmitz-Kempen, T.
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Schmitz-Kempen, Thorsten
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Vogl, A. H.
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Wang, D. T.
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2007 (6)
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Fachbereich Elektrotechnik und Informationstechnik
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Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan
(2007)
Prume, Klaus
;
Muralt, Paul
;
Calame, Florian
;
Schmitz-Kempen, Thorsten
A simple and powerful analytical model for MEMS piezoelectric multimorphs / Booij, W. E. ; Vogl, A. H. ; Wang, D. T. ; Tyholdt, F. ; Ostbo, N. P. ; Raeder, H. ; Prume, K.
(2007)
Prume, Klaus
;
Booij, W. E.
;
Vogl, A. H.
;
Wang, D. T.
Chemically derived seeding layer for {100}-textured PZT thin films / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P.
(2007)
Prume, Klaus
;
Tyholdt, F.
;
Calame, F.
;
Raeder, H.
Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.
(2007)
Prume, Klaus
;
Raeder, H.
;
Tyholdt, F.
;
Booij, W. E.
Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application / Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.;
(2007)
Prume, Klaus
Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;
(2007)
Prume, Klaus
;
Muralt, P.
;
Calame, F.
;
Schmitz-Kempen, T.
1
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6