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Author
Klaus Prume
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Rainer Waser
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Klaus Franken
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Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan
(2007)
Klaus Prume
;
Paul Muralt
;
Florian Calame
;
Thorsten Schmitz-Kempen
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