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The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.
LIGA-Technik zur Fertigung von Mikroaktoren. Ehrfeld. W.; Kämper, K.-P.; Lehr, H.; Michel, F.
(1993)