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Kurowski, A.
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Lüth, H.
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INB - Institut für Nano- und Biotechnologien
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Micro- and nanopatterning of sensor chips by means of macroporous silicon.
(2002)
Kurowski, A.
;
Schultze, J.
;
Lüth, H.
;
Schöning, Michael Josef
Capacitive microsensors for biochemical sensing on porous silicon technology
(2000)
Schöning, Michael Josef
;
Kurowski, A.
;
Thust, M.
;
Kordos, P.
;
Schultze, J. W.
;
Lüth, H.
Micro- and nanopatterning of sensor chips by means of macroporous silicon
(2001)
Kurowski, A.
;
Schultze, J.W.
;
Lüth, H.
;
Schöning, Michael Josef
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3