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Author
L. Beckers (4)
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1998
(1)
1996
(2)
1995
(1)
Language
German
(2)
English
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Ein langzeitstabiler pH-Sensor auf Siliziumbasis hergestellt in Dünnschichttechnik mittels Laserablation
(1998)
Michael Josef Schöning
;
T. Prämassing
;
L. Beckers
;
W. Zander
Dünne Al2O3-Schichten für pH-Sensoren auf Halbleiterbasis mittels Laserablation
(1996)
Michael Josef Schöning
;
A. Schaub
;
L. Beckers
;
W. Zander
A novel silicon-based pH sensor prepared by pulsed laser deposition technique
(1996)
Michael Josef Schöning
;
L. Beckers
;
A. Schaub
;
W. Zander
;
J. Schubert
;
S. Mesters
;
P. Kordos
;
H. Lüth
Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors
(1995)
Michael Josef Schöning
;
A. Schaub
;
A. Zundel
;
L. Beckers
;
J. Schubert
;
W. Zander
;
P. Kordos
;
H. Lüth
1
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4