570 Biowissenschaften; Biologie
Refine
Year of publication
- 2006 (1)
Institute
Has Fulltext
- yes (1)
Language
- English (1)
Document Type
Keywords
- layer expansion (1) (remove)
Is part of the Bibliography
- no (1)
A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.