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Author
W. Ehrfeld (12)
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1998
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1994
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English (12)
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Fachbereich Maschinenbau und Mechatronik (12)
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Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.
(1998)
Klaus-Peter Kämper
;
M. Abraham
;
W. Ehrfeld
;
V. Hessel
Simulation supported design of LIGA Microsystems. Kämper, K.-P.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.
(1995)
Klaus-Peter Kämper
;
J. Döpper
;
W. Ehrfeld
;
B. Hagemann
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