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Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
(2006)
A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.
The nonlinear scalar constitutive equations of gases lead to a change in sound speed from point to point as would be found in linear inhomogeneous (and time dependent) media. The nonlinear tensor constitutive equations of solids introduce the additional local effect of solution dependent anisotropy. The speed of a wave passing through a point changes with propagation direction and its rays are inclined to the front. It is an open question whether the widely used operator splitting techniques achieve a dimensional splitting with physically reasonable results for these multi-dimensional problems. May be this is the main reason why the theoretical and numerical investigations of multi-dimensional wave propagation in nonlinear solids are so far behind gas dynamics. We hope to promote the subject a little by a discussion of some fundamental aspects of the solution of the equations of nonlinear elastodynamics. We use methods of characteristics because they only integrate mathematically exact equations which have a direct physical interpretation.
We report on the synthesis and CO gas-sensing properties of mesoporous tin(IV) oxides (SnO2). For the synthesis cetyltrimethylammonium bromide (CTABr) was used as a structure-directing agent; the resulting SnO2 powders were applied as films to commercially available sensor substrates by drop coating. Nitrogen physisorption shows specific surface areas up to 160 m2·g-1 and mean pore diameters of about 4 nm, as verified by TEM. The film conductance was measured in dependence on the CO concentration in humid synthetic air at a constant temperature of 300 °C. The sensors show a high sensitivity at low CO concentrations and turn out to be largely insensitive towards changes in the relative humidity. We compare the materials with commercially available SnO2-based sensors.
In: Advances in intelligent computing in engineering : proceedings of the 9.International EG-ICE Workshop ; Darmstadt, (01 - 03 August) 2002 / Martina Schnellenbach-Held ... (eds.) . - Düsseldorf: VDI-Verl., 2002 .- Fortschritt-Berichte VDI, Reihe 4, Bauingenieurwesen ; 180 ; S. 1-35 The paper describes a novel way to support conceptual design in civil engineering. The designer uses semantical tools guaranteeing certain internal structures of the design result but also the fulfillment of various constraints. Two different approaches and corresponding tools are discussed: (a) Visually specified tools with automatic code generation to determine a design structure as well as fixing various constraints a design has to obey. These tools are also valuable for design knowledge specialist. (b) Extensions of existing CAD tools to provide semantical knowledge to be used by an architect. It is sketched how these different tools can be combined in the future. The main part of the paper discusses the concepts and realization of two prototypes following the two above approaches. The paper especially discusses that specific graphs and the specification of their structure are useful for both tool realization projects.
Heavy metal detection with semiconductor devices based on PLD-prepared chalcogenide glass thin films
(2007)
An array of 50 MHz quartz microbalances (QMBs) coated with a dendronized polymer was used to detect small amounts of volatile organic compounds (VOCs) in the gas phase. The results were compared to those obtained with the commonly used 10 MHz QMBs. The 50 MHz QMBs proved to be a powerful tool for the detection of VOCs in the gas phase; therefore, they represent a promising alternative to the much more delicate surface acoustic wave devices (SAWs).
The propagation of mechanical waves in plates of isotropic elastic material is investigated. After a short introduction to the understanding of focussing of stress waves in a plate with a curved boundary the method of characteristics is applied to a plate of hyperelastic material. Using this method the propagation of acceleration waves is discussed. Based on this a numerical difference scheme is developed for solving initial-boundary-value problems and applied to two examples: propagation of a point disturbance in a homogeneously finitely strained non-linear elastic plate and geometrical focussing in al linear elastic plate.
Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing nondispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated by employing different kinds of metallic and semiconductor heater materials. Our results clearly reveal the superior high-temperature performance of semiconductor over metallic heater materials. Long-term stable emitter operation in the vicinity of 1300 K could be attained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements.