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Hands-on-training in high technology areas is usually limited due to the high cost for lab infrastructure and equipment. One specific example is the field of MEMS, where investment and upkeep of clean rooms with microtechnology equipment is either financed by production or R&D projects greatly reducing the availability for education purposes. For efficient hands-on-courses a MEMS training foundry, currently used jointly by six higher education institutions, was established at FH Kaiserslautern. In a typical one week course, students manufacture a micromachined pressure sensor including all lithography, thin film and packaging steps. This compact and yet complete program is only possible because participants learn to use the different complex machines in advance via a Virtual Training Lab (VTL). In this paper we present the concept of the MEMS training foundry and the VTL preparation together with results from a scientific evaluation of the VTL over the last three years.
Quartz crystal nanobalance (QCN) sensors are considered as powerful masssensitive sensors to determine materials in the sub-nanogram level. In this study, a single piezoelectric quartz crystal nanobalance modified with polystyrene was employed to detect benzene, toluene, ethylbenzene and xylene (BTEX compounds). The frequency shift of the QCN sensor was found to be linear against the BTEX compound concentrations in the range about 1-45 mg l-1. The correlation coefficients for benzene, toluene, ethylbenzene, and xylene were 0.991, 0.9977, 0.9946 and 0.9971, respectively. The principal component analysis was also utilized to process the frequency response data of the single piezoelectric crystal at different times, considering to the different adsorption-desorption dynamics of BTEX compounds. Using principal component analysis, it was found that over 90% of the data variance could still be explained by use of two principal components (PC1 and PC2). Subsequently, the successful identification of benzene and toluene was possible through the principal component analysis of the transient responses of the polystyrene modified QCN sensor. The results showed that the polystyrene-modified QCN had favorable identification and quantification performances for the BTEX compounds.
An H2O2 sensor for the application in industrial sterilisation processes has been developed. Therefore, automated sterilisation equipment at laboratory scale has been constructed using parts from industrial sterilisation facilities. In addition, a software tool has been developed for the control of the sterilisation equipment at laboratory scale. First measurements with the developed sensor set-up as part of the sterilisation equipment have been performed and the sensor has been physically characterised by optical microscopy and SEM.