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The Solar-Institut Jülich (SIJ) and the companies Hilger GmbH and Heliokon GmbH from Germany have developed a small-scale cost-effective heliostat, called “micro heliostat”. Micro heliostats can be deployed in small-scale concentrated solar power (CSP) plants to concentrate the sun's radiation for electricity generation, space or domestic water heating or industrial process heat. In contrast to conventional heliostats, the special feature of a micro heliostat is that it consists of dozens of parallel-moving, interconnected, rotatable mirror facets. The mirror facets array is fixed inside a box-shaped module and is protected from weathering and wind forces by a transparent glass cover. The choice of the building materials for the box, tracking mechanism and mirrors is largely dependent on the selected production process and the intended application of the micro heliostat. Special attention was paid to the material of the tracking mechanism as this has a direct influence on the accuracy of the micro heliostat. The choice of materials for the mirror support structure and the tracking mechanism is made in favor of plastic molded parts. A qualification assessment method has been developed by the SIJ in which a 3D laser scanner is used in combination with a coordinate measuring machine (CMM). For the validation of this assessment method, a single mirror facet was scanned and the slope deviation was computed.