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V. Cambel (2)
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2002 (2)
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Preparation of patterned GaAs structures for MEMS and MOEMS. Cambel, V.; Kicin, S.; Kuliffayová, M.; Kovácová, E.; Novák, J.; Kostic, I.; Förster, A.
(2002)
Arnold Förster
;
V. Cambel
;
S. Kicin
;
M. Kuliffayová
Fabrication of GaAs symmetric pyramidal mesas prepared by wet-chemical etching using AlAs interlayer. Kicin, S.; Cambel, V.; Kuliffayova, M.; Gregusova, D.; Kovacova, E.; Novak, J.; Kostic, I.; Forster, A.
(2002)
Arnold Förster
;
S Kicin
;
V. Cambel
;
M. Kuliffayova
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