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A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.
Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
(2006)
Poghossian, Arshak ; Schumacher, Kerstin ; Kloock, Joachim P. ; Rosenkranz, Christian ; Schultze, Joachim W. ; Müller-Veggian, Mattea ; Schöning, Michael Josef
A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.
In this paper the way to a 5-day-car with respect to a modular valve train systems for spark ignited combustion engines is shown. The necessary product diversity is shift from mechanical or physical components to software components. Therefore, significant improvements of logistic indicators are expected and shown. The working principle of a camless cylinder head with respect to an electromagnetical valve train (EMVT) is explained and it is demonstrated that shifting physical diversity to software is feasible. The future design of combustion engine systems including customisation can be supported by a set of assistance tools which is shown exemplary.
One of the most important parameters in a burning chamber - in power stations, in waste to energy plants - is the temperature. This temperature is in the range of 700-1500 °C - one of the most advanced measuring methods being the acoustic pyrometry with the possibility of producing temperature mapping in one level of the burning chamber - comparable to computer tomography. The results of these measurements discussed in the presentation can be used - to fulfil the legal requirements in the FRG or in the EU - to equalise the temperature in one level of the burning chamber to optimise the steam production (better efficiency of the plant) and to minimise the production of temperature controlled flue gas components (NO, CO a. o.) - to control the SNCR-process if used.
The Ministry of Science and Research in North Rhine-Westphalia created eight platforms of excellence, one in the research area „Energy and Environment“ in 2002 at ACUAS. This platform concentrates the research and development of 13 professors in Jülich and Aachen and of two scientific institutes with different topics: – NOWUM-Energy with emphasis on efficient and economic energy conversion – The Solar Institute Jülich – SIJ – being the largest research institute in the field of renewables at a University of Applied Sciences in Germany With this platform each possible energy conversion – nuclear, fossil, renewable- can be dealt with to help solving the two most important problems of mankind, energy and potable water. At the CSE are presented the historical development, some research results and the combined master studies in „Energy Systems“ and „Nuclear Applications“