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The chemical imaging sensor is a semiconductor-based chemical sensor that can visualize the two-dimensional distribution of specific ions or molecules in the solution. In this study, we developed a miniaturized chemical imaging sensor system with an OLED display panel as a light source that scans the sensor plate. In the proposed configuration, the display panel is placed directly below the sensor plate and illuminates the back surface. The measured area defined by illumination can be arbitrarily customized to fit the size and the shape of the sample to be measured. The waveform of the generated photocurrent, the currentvoltage characteristics and the pH sensitivity were investigated and pH imaging with this miniaturized system was demonstrated.
In this contribution, we focus on the detection of toxic gases with living eukaryotic cells. A cell-based gas sensor system, able to measure the effects of direct exposure of gases to cells in real-time, was set up. Impedance data as well as oxygen consumption of Chinese hamster lung fibroblast cells (V79) were analysed upon exposure to carbon monoxide (CO). The CO (diluted in wet synthetic air) affects the cell respiration as indicated by an attenuated respiration signal after the CO exposure as well as an instant increase of the capacitive part of the impedance signal during the gas exposure.
Es wurde ein automatisiertes, computerunterstütztes Testsystem für die Funktionsprüfung und Charakterisierung von (bio-)chemischen Sensoren auf Waferebene entwickelt und in einen konventionellen Spitzenmessplatz integriert. Das System ermöglicht die Charakterisierung und Identifizierung „funktionstauglicher“ Sensoren bereits auf Waferebene zwischen den einzelnen Herstellungsschritten, wodurch weitere, bisher übliche Verarbeitungsschritte wie das Fixieren, Bonden und Verkapseln für die defekten oder nicht funktionstauglichen Sensorstrukturen entfällt. Außerdem bietet eine speziell entworfene miniaturisierte Durchflussmesszelle die Möglichkeit, bereits auf Waferlevel die Sensitivität, Drift, Hysterese und Ansprechzeit der (bio-)chemischen Sensoren zu charakterisieren. Das System wurde exemplarisch mit kapazitiven, pH-sensitiven EIS- (Elektrolyt-Isolator-Silizium) Strukturen und ISFET- (ionensensitiver Feldeffekttransistor) Strukturen mit verschiedenen Geometrien und Gate-Layouts getestet.
Realization of a calorimetric gas sensor on polyimide foil for applications in aseptic food industry
(2010)
A calorimetric gas sensor is presented for the monitoring of gas-phase H2O2 at elevated temperature during sterilization processes in aseptic food industry. The sensor consists of two temperature-sensitive thin-film resistances built up on a polyimide foil with a thickness of 25 μm, which are passivated with a layer of SU-8 photo resist and catalytically activated with manganese(IV) oxide. Instead of an active heating structure, the calorimetric sensor utilizes the elevated temperature of an evaporated H2O2 aerosol. In an experimental set-up, the sensor has shown a sensitivity of 4.78 °C/(%v/v) in a H2O2 concentration range of 0 to 10% v/v at an evaporation temperature of 240 ∘C. Furthermore, the sensor possesses the same, unchanged sensor signal even at varied evaporation temperatures of the gas stream. The sensor characterization demonstrates the suitability of the calorimetric gas sensor for monitoring the efficiency of sterilization processes.
Chemical imaging systems allow the visualisation of the distribution of chemical species on the sensor surface. This work represents a new flexible approach of read out in a light-addressable potentiometric sensor (LAPS) with the help of a digital light processing (DLP) set-up. The DLP, known well for video projectors, consists of a mirror-array MEMS device which allows fast and flexible generation of light patterns. With the help of these light patterns the sensor surface of the LAPS device can be read out sequentially in a raster like scheme (scanning LAPS). The DLP approach has several advantages compared to conventional scanning LAPS set-ups, e.g., the spot size, the shape and the intensity of the light pointer can be changed easily and no mechanical movement is necessary, which reduces the size of the set-up and increases the stability and speed of measurement.