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Mechanical stimulation of the cells resulted in evident changes in the cell morphology, protein composition and gene expression. Microscopically, additional formation of stress fibers accompanied by cell re-arrangements in a monolayer was observed. Also, significant activation of p53 gene was revealed as compared to control. Interestingly, the use of CellTech membrane coating induced cell death after mechanical stress had been applied. Such an effect was not detected when fibronectin had been used as an adhesion substrate.
A procedure for the evaluation of the failure probability of elastic-plastic thin shell structures is presented. The procedure involves a deterministic limit and shakedown analysis for each probabilistic iteration which is based on the kinematical approach and the use the exact Ilyushin yield surface. Based on a direct definition of the limit state function, the non-linear problems may be efficiently solved by using the First and Second Order Reliabiblity Methods (Form/SORM). This direct approach reduces considerably the necessary knowledge of uncertain technological input data, computing costs and the numerical error. In: Computational plasticity / ed. by Eugenio Onate. Dordrecht: Springer 2007. VII, 265 S. (Computational Methods in Applied Sciences ; 7) (COMPLAS IX. Part 1 . International Center for Numerical Methods in Engineering (CIMNE)). ISBN 978-1-402-06576-7 S. 186-189
Manufacturing companies are forced to operate in an increasingly volatile and unpredictabl environment. The number of events that can have a potentially critical impact on a production system‘s economic performance have significantly increased. This forces companies to invest considerably more in flexible and robust production systems capable of withstanding a certain amount of change however unable to quantify the benefits in advance. The satisfactory quantification and assessment of these qualities – Flexibility and Robustness –has not been realized yet. This paper discusses commonality between Flexibility and Robustness and offers a new approach to connect changes in the environment with the elements of a production system and thus quantifying its flexibility and robustness.
Flexible Fuel Operation of a Dry-Low-Nox Micromix Combustor with Variable Hydrogen Methane Mixtures
(2019)
Flight times to the heliopause using a combination of solar and radioisotope electric propulsion
(2011)
We investigate the interplanetary flight of a low-thrust space probe to the heliopause,located at a distance of about 200 AU from the Sun. Our goal was to reach this distance within the 25 years postulated by ESA for such a mission (which is less ambitious than the 15-year goal set by NASA). Contrary to solar sail concepts and combinations of allistic and electrically propelled flight legs, we have investigated whether the set flight time limit could also be kept with a combination of solar-electric propulsion and a second, RTG-powered upper stage. The used ion engine type was the RIT-22 for the first stage and the RIT-10 for the second stage. Trajectory optimization was carried out with the low-thrust optimization program InTrance, which implements the method of Evolutionary Neurocontrol,using Artificial Neural Networks for spacecraft steering and Evolutionary Algorithms to optimize the Neural Networks’ parameter set. Based on a parameter space study, in which the number of thrust units, the unit’s specific impulse, and the relative size of the solar power generator were varied, we have chosen one configuration as reference. The transfer time of this reference configuration was 29.6 years and the fastest one, which is technically
more challenging, still required 28.3 years. As all flight times of this parameter study were longer than 25 years, we further shortened the transfer time by applying a launcher-provided hyperbolic excess energy up to 49 km2/s2. The resulting minimal flight time for the reference configuration was then 27.8 years. The following, more precise optimization to a launch with the European Ariane 5 ECA rocket reduced the transfer time to 27.5 years. This is the fastest mission design of our study that is flexible enough to allow a launch every
year. The inclusion of a fly-by at Jupiter finally resulted in a flight time of 23.8 years,which is below the set transfer-time limit. However, compared to the 27.5-year transfer,this mission design has a significantly reduced launch window and mission flexibility if the
escape direction is restricted to the heliosphere’s “nose".
Useful market simulations are key to the evaluation of diferent market designs existing of multiple market mechanisms or rules. Yet a simulation framework which has a comparison of diferent market mechanisms in mind was not found. The need to create an objective view on different sets of market rules while investigating meaningful agent strategies concludes that such a simulation framework is needed to advance the research on this subject. An overview of diferent existing market simulation models is given which also shows the research gap and the missing capabilities of those systems. Finally, a methodology is outlined how a novel market simulation which can answer the research questions can be developed.
Frequency Dependent Impedance Analysis of the Foundation-Soil-Systems of Onshore Wind Turbines
(2018)
Messenger apps like WhatsApp and Telegram are frequently used for everyday communication, but they can also be utilized as a platform for illegal activity. Telegram allows public groups with up to 200.000 participants. Criminals use these public groups for trading illegal commodities and services, which becomes a concern for law enforcement agencies, who manually monitor suspicious activity in these chat rooms. This research demonstrates how natural language processing (NLP) can assist in analyzing these chat rooms, providing an explorative overview of the domain and facilitating purposeful analyses of user behavior. We provide a publicly available corpus of annotated text messages with entities and relations from four self-proclaimed black market chat rooms. Our pipeline approach aggregates the extracted product attributes from user messages to profiles and uses these with their sold products as features for clustering. The extracted structured information is the foundation for further data exploration, such as identifying the top vendors or fine-granular price analyses. Our evaluation shows that pretrained word vectors perform better for unsupervised clustering than state-of-the-art transformer models, while the latter is still superior for sequence labeling.
We study the novel possibilities computer aided design and production open up for the design of building systems. Such systems today can, via individualized mass production, consist of a larger number and more complex parts than previously and therefore be assembled into more complex wholes. This opens up the possibility of designing specialized systems specifically for single buildings. The common order of starting with a building system and designing a building using this system can be reversed to designing a building first and then developing a system specifically for that building. We present and discuss research that incorporates students design projects into research work and fosters links between research and teaching.
The paper presents the derivation of a new equivalent skin friction coefficient for estimating the parasitic drag of short-to-medium range fixed-wing unmanned aircraft. The new coefficient is derived from an aerodynamic analysis of ten different unmanned aircraft used on surveillance, reconnaissance, and search and rescue missions. The aircraft are simulated using a validated unsteady Reynolds-averaged Navier Stokes approach. The UAV's parasitic drag is significantly influenced by the presence of miscellaneous components like fixed landing gears or electro-optical sensor turrets. These components are responsible for almost half of an unmanned aircraft's total parasitic drag. The new equivalent skin friction coefficient accounts for these effects and is significantly higher compared to other aircraft categories. It is used to initially size an unmanned aircraft for a typical reconnaissance mission. The improved parasitic drag estimation yields a much heavier unmanned aircraft when compared to the sizing results using available drag data of manned aircraft.
Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
(2006)
A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.
The nonlinear scalar constitutive equations of gases lead to a change in sound speed from point to point as would be found in linear inhomogeneous (and time dependent) media. The nonlinear tensor constitutive equations of solids introduce the additional local effect of solution dependent anisotropy. The speed of a wave passing through a point changes with propagation direction and its rays are inclined to the front. It is an open question whether the widely used operator splitting techniques achieve a dimensional splitting with physically reasonable results for these multi-dimensional problems. May be this is the main reason why the theoretical and numerical investigations of multi-dimensional wave propagation in nonlinear solids are so far behind gas dynamics. We hope to promote the subject a little by a discussion of some fundamental aspects of the solution of the equations of nonlinear elastodynamics. We use methods of characteristics because they only integrate mathematically exact equations which have a direct physical interpretation.
In the RoboCup@Home domestic service robot competition, complex tasks such as "get the cup from the kitchen and bring it to the living room" or "find me this and that object in the apartment" have to be accomplished. At these competitions the robots may only be instructed by natural language. As humans use qualitative concepts such as "near" or "far", the robot needs to cope with them, too. For our domestic robot, we use the robot programming and plan language Readylog, our variant of Golog. In previous work we extended the action language Golog, which was developed for the high-level control of agents and robots, with fuzzy concepts and showed how to embed fuzzy controllers in Golog. In this paper, we demonstrate how these notions can be fruitfully applied to two domestic service robotic scenarios. In the first application, we demonstrate how qualitative fluents based on a fuzzy set semantics can be deployed. In the second program, we show an example of a fuzzy controller for a follow-a-person task.
A Gamified Information System (GIS) implements game concepts and elements, such as affordances and game design principles to motivate people. Based on the idea to develop a GIS to increase the motivation of software developers to perform software quality tasks, the research work at hand aims at investigating relevant requirements from that target group. Therefore, 14 interviews with software development experts are conducted and analyzed. According to the results, software developers prefer the affordances points, narrative storytelling in a multiplayer and a round-based setting. Furthermore, six design principles for the development of a GIS are derived.
Gamification and gamified information systems (GIS) apply video game elements to encourage the work on boring and everyday tasks. Meanwhile, several research works provide evidence that gamification increases efficiency and effectivity of such tasks. The paper at hand investigates the health care sector, which is challenged with cost pressure and suffers in process efficiency. We hypothesize that GIS may improve the efficiency and quality of care processes. By applying an interview-based content analysis, the paper at hand evaluates gamification elements in an assisted living environment and provides three research contributions. First, insights into relevant GIS affordances and application examples for assisted living facilities are given. Second, assisted living experts evaluate GIS design guidelines. Both the relevant affordances and design principles comprise a basis for the development of a GIS for social workers in assisted living facilities. Third, potential adoption barriers and design guidelines for GIS in assisted living are presented.
Industry 4.0 imposes many challenges for manufacturing companies and their employees. Innovative and effective training strategies are required to cope with fast-changing production environments and new manufacturing technologies. Virtual Reality (VR) offers new ways of on-the-job, on-demand, and off-premise training. A novel concept and evaluation system combining Gamification and VR practice for flexible assembly tasks is proposed in this paper and compared to existing works. It is based on directed acyclic graphs and a leveling system. The concept enables a learning speed which is adjustable to the users’ pace and dynamics, while the evaluation system facilitates adaptive work sequences and allows employee-specific task fulfillment. The concept was implemented and analyzed in the Industry 4.0 model factory at FH Aachen for mechanical assembly jobs.
We report on the synthesis and CO gas-sensing properties of mesoporous tin(IV) oxides (SnO2). For the synthesis cetyltrimethylammonium bromide (CTABr) was used as a structure-directing agent; the resulting SnO2 powders were applied as films to commercially available sensor substrates by drop coating. Nitrogen physisorption shows specific surface areas up to 160 m2·g-1 and mean pore diameters of about 4 nm, as verified by TEM. The film conductance was measured in dependence on the CO concentration in humid synthetic air at a constant temperature of 300 °C. The sensors show a high sensitivity at low CO concentrations and turn out to be largely insensitive towards changes in the relative humidity. We compare the materials with commercially available SnO2-based sensors.
Generating synthetic LiDAR point cloud data for object detection using the Unreal Game Engine
(2024)
Object detection based on artificial intelligence is ubiquitous in today’s computer vision research and application. The training of the neural networks for object detection requires large and high-quality datasets. Besides datasets based on image data, datasets derived from point clouds offer several advantages. However, training datasets are sparse and their generation requires a lot of effort, especially in industrial domains. A solution to this issue offers the generation of synthetic point cloud data. Based on the design science research method, the work at hand proposes an approach and its instantiation for generating synthetic point cloud data based on the Unreal Engine. The point cloud quality is evaluated by comparing the synthetic cloud to a real-world point cloud. Within a practical example the applicability of the Unreal Game engine for synthetic point cloud generation could be successfully demonstrated.
Geräuschminderung und Leichtbau in Leistungsgetrieben durch den Einsatz von Werkstoffverbunden
(2007)
Durch die Fragmentierung von Wertschöpfungsketten ergeben sich neue Herausforderungen für das Management von Kundenbeziehungen. Die Dissertation untersucht die daraus resultierenden Anforderungen an eine übergreifende Integration von Customer Relationship Management in der
Telekommunikationsindustrie. Ziel ist es, durch Anwendung von Methoden eines Enterprise Architecture Framework eine übergreifend Lösung zu gestalten. Grundlegende Prämisse dabei ist, dass die übergreifende Gestaltung eines Customer Relationship Management für alle an der
Wertschöpfung beteiligten Unternehmen vorteilhaft ist.
Low-thrust space propulsion systems enable flexible high-energy deep space missions, but the design and optimization of the interplanetary transfer trajectory is usually difficult. It involves much experience and expert knowledge because the convergence behavior of traditional local trajectory optimization methods depends strongly on an adequate initial guess. Within this extended abstract, evolutionary neurocontrol, a method that fuses artificial neural networks and evolutionary algorithms, is proposed as a smart global method for low-thrust trajectory optimization. It does not require an initial guess. The implementation of evolutionary neurocontrol is detailed and its performance is shown for an exemplary mission.
Globale Betrachtung regenerativer Energieressourcen und deren technische Nutzungsmöglichkeiten
(1992)
Globale Stabilitätsanalysen zylindrischer, seismisch belasteter Tanks auf numerischer Grundlage
(2015)
Among many approaches to address the high-level decision making problem for autonomous robots and agents, the robot program¬ming and plan language Golog follows a logic-based deliberative approach, and its successors were successfully deployed in a number of robotics applications over the past ten years. Usually, Golog interpreter are implemented in Prolog, which is not available for our target plat¬form, the bi-ped robot platform Nao. In this paper we sketch our first approach towards a prototype implementation of a Golog interpreter in the scripting language Lua. With the example of the elevator domain we discuss how the basic action theory is specified and how we implemented fluent regression in Lua. One possible advantage of the availability of a Non-Prolog implementation of Golog could be that Golog becomes avail¬able on a larger number of platforms, and also becomes more attractive for roboticists outside the Cognitive Robotics community.
One central challenge for self-driving cars is a proper path-planning. Once a trajectory has been found, the next challenge is to accurately and safely follow the precalculated path. The model-predictive controller (MPC) is a common approach for the lateral control of autonomous vehicles. The MPC uses a vehicle dynamics model to predict the future states of the vehicle for a given prediction horizon. However, in order to achieve real-time path control, the computational load is usually large, which leads to short prediction horizons. To deal with the computational load, the control algorithm can be parallelized on the graphics processing unit (GPU). In contrast to the widely used stochastic methods, in this paper we propose a deterministic approach based on grid search. Our approach focuses on systematically discovering the search area with different levels of granularity. To achieve this, we split the optimization algorithm into multiple iterations. The best sequence of each iteration is then used as an initial solution to the next iteration. The granularity increases, resulting in smooth and predictable steering angle sequences. We present a novel GPU-based algorithm and show its accuracy and realtime abilities with a number of real-world experiments.
Die vorliegende Arbeit zeichnet sich dadurch aus, dass registrierte unsegmentierte Volumina aus multimodalen Bilddatensätzen (z.B. MRT, PET) gleichzeitig in einer 3D-Rekonstruktion visualisiert werden und in Echtzeit manipuliert werden können. Ermöglicht wird die Echtzeitfähigkeit durch die Programmierung der Algorithmen zur direkten Volumenvisualisierung auf der Grafikkarte mittels der neuen CUDA-Technologie. Die Zuordnung der Farbeigenschaften wird über 1D-Transferfunktionen für jedes Volumen getrennt gesteuert. So können durch die interaktive Veränderung der 1D-Transferfunktion Detailinformationen aus den zwei Bilddatensätzen getrennt kontrolliert werden und die Vorteile der verschiedenen Bildmodalitäten in einer Visualisierung genutzt werden. Mittels dieses interaktiven Frameworks können neue Erkenntnisse insbesondere über neurodegenerativen Erkrankungen gewonnen werden.
The integration of high temperature thermal energy storages into existing conventional power plants can help to reduce the CO2 emissions of those plants and lead to lower capital expenditures for building energy storage systems, due to the use of synergy effects [1]. One possibility to implement that, is a molten salt storage system with a powerful power-to-heat unit. This paper presents two possible control concepts for the startup of the charging system of such a facility. The procedures are implemented in a detailed dynamic process model. The performance and safety regarding the film temperatures at heat transmitting surfaces are investigated in the process simulations. To improve the accuracy in predicting the film temperatures, CFD simulations of the electrical heater are carried out and the results are merged with the dynamic model. The results show that both investigated control concepts are safe regarding the temperature limits. The gradient controlled startup performed better than the temperature-controlled startup. Nevertheless, there are several uncertainties that need to be investigated further.
In: Advances in intelligent computing in engineering : proceedings of the 9.International EG-ICE Workshop ; Darmstadt, (01 - 03 August) 2002 / Martina Schnellenbach-Held ... (eds.) . - Düsseldorf: VDI-Verl., 2002 .- Fortschritt-Berichte VDI, Reihe 4, Bauingenieurwesen ; 180 ; S. 1-35 The paper describes a novel way to support conceptual design in civil engineering. The designer uses semantical tools guaranteeing certain internal structures of the design result but also the fulfillment of various constraints. Two different approaches and corresponding tools are discussed: (a) Visually specified tools with automatic code generation to determine a design structure as well as fixing various constraints a design has to obey. These tools are also valuable for design knowledge specialist. (b) Extensions of existing CAD tools to provide semantical knowledge to be used by an architect. It is sketched how these different tools can be combined in the future. The main part of the paper discusses the concepts and realization of two prototypes following the two above approaches. The paper especially discusses that specific graphs and the specification of their structure are useful for both tool realization projects.
In: Proceedings of the 39th Annual Hawaii International Conference on System Sciences, 2006. HICSS '06 http://dx.doi.org/10.1109/HICSS.2006.200 The conceptual design phase at the beginning of the building construction process is not adequately supported by any CAD-tool. Conceptual design support needs regarding two aspects: first, the architect must be able to develop conceptual sketches that provide abstraction from constructive details. Second, conceptually relevant knowledge should be available to check these conceptual sketches. The paper deals with knowledge to formalize for conceptual design. To enable domain experts formalizing knowledge, a graph-based specification is presented that allows the development of a domain ontology and design rules specific for one class of buildings at runtime. The provided tool support illustrates the introduced concepts and demonstrates the consistency analysis between knowledge and conceptual design.
Water suppliers are faced with the great challenge of achieving high-quality and, at the same time, low-cost water supply. In practice, the focus is set on the most beneficial maintenance measures and/or capacity adaptations of existing water distribution systems (WDS). Since climatic and demographic influences will pose further challenges in the future, the resilience enhancement of WDS, i.e. the enhancement of their capability to withstand and recover from disturbances, has been in particular focus recently. To assess the resilience of WDS, metrics based on graph theory have been proposed. In this study, a promising approach is applied to assess the resilience of the WDS for a district in a major German City. The conducted analysis provides insight into the process of actively influencing the
resilience of WDS
This paper describes the results and methods used during the 8th Global Trajectory Optimization Competition (GTOC) of the DLR team. Trajectory optimization is crucial for most of the space missions and usually can be formulated as a global optimization problem. A lot of research has been done to different type of mission problems. The most demanding ones are low thrust transfers with e.g. gravity assist sequences. In that case the optimal control problem is combined with an integer problem. In most of the GTOCs we apply a filtering of the problem based on domain knowledge.
Extracting workflow nets from textual descriptions can be used to simplify guidelines or formalize textual descriptions of formal processes like business processes and algorithms. The task of manually extracting processes, however, requires domain expertise and effort. While automatic process model extraction is desirable, annotating texts with formalized process models is expensive. Therefore, there are only a few machine-learning-based extraction approaches. Rule-based approaches, in turn, require domain specificity to work well and can rarely distinguish relevant and irrelevant information in textual descriptions. In this paper, we present GUIDO, a hybrid approach to the process model extraction task that first, classifies sentences regarding their relevance to the process model, using a BERT-based sentence classifier, and second, extracts a process model from the sentences classified as relevant, using dependency parsing. The presented approach achieves significantly better resul ts than a pure rule-based approach. GUIDO achieves an average behavioral similarity score of 0.93. Still, in comparison to purely machine-learning-based approaches, the annotation costs stay low.
Harte Echtzeit für Windows
(1999)
Near-Earth asteroid (NEA) 99942 Apophis provides a typical example for the evolution of asteroid orbits that lead to Earth-impacts after a close Earth-encounter that results in a resonant return. Apophis will have a close Earth-encounter in 2029 with potential very close subsequent Earth-encounters (or even an impact) in 2036 or later, depending on whether it passes through one of several less than 1 km-sized gravitational keyholes during its 2029-encounter. A pre-2029 kinetic impact is a very favorable option to nudge the asteroid out of a keyhole. The highest impact velocity and thus deflection can be achieved from a trajectory that is retrograde to Apophis orbit. With a chemical or electric propulsion system, however, many gravity assists and thus a long time is required to achieve this. We show in this paper that the solar sail might be the better propulsion system for such a mission: a solar sail Kinetic Energy Impactor (KEI) spacecraft could impact Apophis from a retrograde trajectory with a very high relative velocity (75-80 km/s) during one of its perihelion passages. The spacecraft consists of a 160 m × 160 m, 168 kg solar sail assembly and a 150 kg impactor. Although conventional spacecraft can also achieve the required minimum deflection of 1 km for this approx. 320 m-sized object from a prograde trajectory, our solar sail KEI concept also allows the deflection of larger objects. For a launch in 2020, we also show that, even after Apophis has flown through one of the gravitational keyholes in 2029, the solar sail KEI concept is still feasible to prevent Apophis from impacting the Earth, but many KEIs would be required for consecutive impacts to increase the total Earth-miss distance to a safe value
The recovery of waste heat requires heat exchangers to extract it from a liquid or gaseous medium into another working medium, a refrigerant. In Organic Rankine Cycles (ORC) on Combustion Engines there are two major heat sources, the exhaust gas and the water/glycol fluid from the engine’s cooling circuit. A heat exchanger design must be adapted to the different requirements and conditions resulting from the heat sources, fluids, system configurations, geometric restrictions, and etcetera. The Stacked Shell Cooler (SSC) is a new and very specific design of a plate heat exchanger, created by AKG, which allows with a maximum degree of freedom the optimization of heat exchange rate and the reduction of the related pressure drop. This optimization in heat exchanger design for ORC systems is even more important, because it reduces the energy consumption of the system and therefore maximizes the increase in overall efficiency of the engine.
Heavy metal detection with semiconductor devices based on PLD-prepared chalcogenide glass thin films
(2007)
An array of 50 MHz quartz microbalances (QMBs) coated with a dendronized polymer was used to detect small amounts of volatile organic compounds (VOCs) in the gas phase. The results were compared to those obtained with the commonly used 10 MHz QMBs. The 50 MHz QMBs proved to be a powerful tool for the detection of VOCs in the gas phase; therefore, they represent a promising alternative to the much more delicate surface acoustic wave devices (SAWs).
In: Konferenzband zur Konferenz Medienproduktion 2007, 1.12.2008. 29 S. High Quality Streaming beschäftigt sich mit High Definition Television und Mehrkanal Sound. In diesem Beitrag werden die Technologien und Anwendungsperspektiven für HD Medien-Dienstleistungen beschrieben. Der Beitrag entstand im Rahmen der Konferenz Medienproduktion „Expansion und Mobilität“ am 7. Dezember 2007. Der Beitrag beschreibt Geschäftsmodelle, Technologien und neue Anwendungen für High Quality Streaming. Neben der Präsentation wurden auch die Medienproduktionen der unterschiedlichen HQ-Mediendienste vorgeführt. Die Mediendienste sind im Rahmen der Forschungsarbeit High Quality Media Services des Studiengangs Communication and Multimedia Design (Fachbereich Elektrotechnik und Informationstechnik) an der Fachhochschule Aachen entstanden. Eine Marktevaluierung der deutschen und niederländischen Märkte, internationale Expertengesprächen sowie ein Prototypen HDMediaservices bilden die Basis der Forschungsarbeit. Die Mediendienste stehen zur Demonstration unter dem Link media.fh-aachen.de bereit. HQ-Mediendienste bedeuten: Gestochen scharfe Bilder in High Definition, volle Klänge in Surround und das über das Internet, wo doch gerade mal die briefmarkengroßen Bilder mit unscharfen Konturen und krätzenden Klängen der heutigen Portale wie YouTube Alltag sind.
The propagation of mechanical waves in plates of isotropic elastic material is investigated. After a short introduction to the understanding of focussing of stress waves in a plate with a curved boundary the method of characteristics is applied to a plate of hyperelastic material. Using this method the propagation of acceleration waves is discussed. Based on this a numerical difference scheme is developed for solving initial-boundary-value problems and applied to two examples: propagation of a point disturbance in a homogeneously finitely strained non-linear elastic plate and geometrical focussing in al linear elastic plate.
Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing nondispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated by employing different kinds of metallic and semiconductor heater materials. Our results clearly reveal the superior high-temperature performance of semiconductor over metallic heater materials. Long-term stable emitter operation in the vicinity of 1300 K could be attained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements.