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Geittner, P.
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Hagemann, Hans-Jürgen
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Warnier, J.
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Wilson, H.
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1986 (1)
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Fachbereich Elektrotechnik und Informationstechnik (1)
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PCVD at high deposition rates. Geittner, P.; Hagemann, H. J.; Warnier, J.; Wilson, H.
(1986)
Hagemann, Hans-Jürgen
;
Geittner, P.
;
Warnier, J.
;
Wilson, H.
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