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W. Ehrfeld (2)
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1994 (2)
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LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; Kämper, K.-P.; Koch, L.; Lehr, H.; Roth, T.
(1994)
Klaus-Peter Kämper
;
C. Schulz
;
W. Ehrfeld
;
R. Erbel
LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.; Schmidt, M.
(1994)
Klaus-Peter Kämper
;
H. Lehr
;
W. Ehrfeld
;
F. Michel
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