Refine
Year of publication
- 2024 (127)
- 2023 (256)
- 2022 (301)
- 2021 (293)
- 2020 (241)
- 2019 (378)
- 2018 (259)
- 2017 (259)
- 2016 (277)
- 2015 (301)
- 2014 (301)
- 2013 (301)
- 2012 (332)
- 2011 (328)
- 2010 (342)
- 2009 (369)
- 2008 (311)
- 2007 (312)
- 2006 (330)
- 2005 (303)
- 2004 (323)
- 2003 (254)
- 2002 (250)
- 2001 (221)
- 2000 (245)
- 1999 (236)
- 1998 (242)
- 1997 (220)
- 1996 (202)
- 1995 (192)
- 1994 (174)
- 1993 (154)
- 1992 (144)
- 1991 (100)
- 1990 (108)
- 1989 (111)
- 1988 (104)
- 1987 (105)
- 1986 (81)
- 1985 (84)
- 1984 (75)
- 1983 (70)
- 1982 (57)
- 1981 (54)
- 1980 (61)
- 1979 (58)
- 1978 (52)
- 1977 (32)
- 1976 (30)
- 1975 (28)
- 1974 (17)
- 1973 (12)
- 1972 (17)
- 1971 (11)
- 1970 (2)
- 1969 (2)
- 1968 (2)
- 1967 (1)
- 1963 (1)
- 1925 (1)
Institute
- Fachbereich Medizintechnik und Technomathematik (2074)
- Fachbereich Elektrotechnik und Informationstechnik (1184)
- Fachbereich Wirtschaftswissenschaften (1158)
- Fachbereich Energietechnik (1115)
- Fachbereich Chemie und Biotechnologie (912)
- Fachbereich Maschinenbau und Mechatronik (868)
- Fachbereich Luft- und Raumfahrttechnik (798)
- Fachbereich Bauingenieurwesen (711)
- IfB - Institut für Bioengineering (690)
- INB - Institut für Nano- und Biotechnologien (615)
Language
- German (5114)
- English (4909)
- Russian (14)
- Portuguese (6)
- Multiple languages (5)
- Spanish (3)
- Dutch (2)
- Italian (1)
Document Type
- Article (5646)
- Conference Proceeding (1639)
- Book (1079)
- Part of a Book (559)
- Bachelor Thesis (327)
- Patent (174)
- Report (101)
- Doctoral Thesis (79)
- Other (76)
- Administrative publication (76)
Keywords
- Amtliche Mitteilung (71)
- Bachelor (33)
- Aachen University of Applied Sciences (31)
- Master (31)
- Prüfungsordnung (31)
- Bauingenieurwesen (30)
- Lesbare Fassung (28)
- Biosensor (25)
- Fachhochschule Aachen (23)
- Illustration (23)
Zugriffsart
- campus (2147)
- weltweit (1860)
- bezahl (766)
- fachbereichsweit (FB4) (34)
Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.