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A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.
Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
(2006)
A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.
Development of an optimized LSO/LuYAP phoswich detector head for the Lausanne ClearPET demonstrator
(2006)
This paper describes the LSO/LuYAP phoswich detector head developed for the ClearPET small animal PET scanner demonstrator that is under construction in Lausanne within the Crystal Clear Collaboration. The detector head consists of a dual layer of 8×8 LSO and LuYAP crystal arrays coupled to a multi-anode photomultiplier tube (Hamamatsu R7600-M64). Equalistion of the LSO/LuYAP light collection is obtained through partial attenuation of the LSO scintillation light using a thin aluminum deposit of 20-35 nm on LSO and appropriate temperature regulation of the phoswich head between 30°C to 60°C. At 511keV, typical FWHM energy resolutions of the pixels of a phoswich head amounts to (28±2)% for LSO and (25±2)% for LuYAP. The LSO versus LuYAP crystal identification efficiency is better than 98%. Six detector modules have been mounted on a rotating gantry. Axial and tangential spatial resolutions were measured up to 4 cm from the scanner axis and compared to Monte Carlo simulations using GATE. FWHM spatial resolution ranges from 1.3 mm on axis to 2.6 mm at 4 cm from the axis.
In: Advanced Engineering Informatics. Vol 21, Issue 1, 2007, Pages 67-83 http://dx.doi.org/10.1016/j.aei.2006.10.001 eds. J.C. Kunz, I.F.C. Smith and T. Tomiyama, Elsevier, Seite 1-22 Current CAD tools are not able to support the conceptual design phase, and none of them provides a consistency analysis for sketches produced by architects. This phase is fundamental and crucial for the whole design and construction process of a building. To give architects a better support, we developed a CAD tool for conceptual design and a knowledge specification tool. The knowledge is specific to one class of buildings and it can be reused. Based on a dynamic and domain-specific knowledge ontology, different types of design rules formalize this knowledge in a graph-based form. An expressive visual language provides a user-friendly, human readable representation. Finally, a consistency analysis tool enables conceptual designs to be checked against this formal conceptual knowledge. In this article, we concentrate on the knowledge specification part. For that, we introduce the concepts and usage of a novel visual language and describe its semantics. To demonstrate the usability of our approach, two graph-based visual tools for knowledge specification and conceptual design are explained.
This work describes a procedure to yield attenuation maps from MR images which are used for the absorption correction (AC) of brain PET data. Such an approach could be mandatory for future combined PET and MRI scanners, which probably do not include a transmission facility. T1-weighted MR images were segmented into brain tissue, bone, soft tissue, and sinus; attenuation coefficients corresponding to elemental composition and density as well as to 511 keV photon energy were respectively assigned. Attenuation maps containing up to four compartments were created and forward projected into sinograms with attenuation factors which then were used for AC during reconstruction of FDG-PET data. The commonly used AC based on a radioactive (68Ge) transmission scan served as reference. The reconstructed radioactivity values obtained with the MRI-based AC were about 20% lower than those obtained with PET-based AC if the skull was not taken into account. Considering the skull the difference was still about 10%. Our investigations demonstrate the feasibility of a MRI-based AC, but revealed also the necessity of a satisfying delineation of bone thickness which tends to be underestimated in our first approach of T1-weighted MR image segmentation.