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Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;
(2007)
Klaus Prume
;
P. Muralt
;
F. Calame
;
T. Schmitz-Kempen
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