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H. Lüth (1)
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1995 (1)
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Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors
(1995)
Michael Josef Schöning
;
A. Schaub
;
A. Zundel
;
L. Beckers
;
J. Schubert
;
W. Zander
;
P. Kordos
;
H. Lüth
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