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The chemical imaging sensor is a semiconductor-based chemical sensor that can visualize the two-dimensional distribution of specific ions or molecules in the solution. In this study, we developed a miniaturized chemical imaging sensor system with an OLED display panel as a light source that scans the sensor plate. In the proposed configuration, the display panel is placed directly below the sensor plate and illuminates the back surface. The measured area defined by illumination can be arbitrarily customized to fit the size and the shape of the sample to be measured. The waveform of the generated photocurrent, the currentvoltage characteristics and the pH sensitivity were investigated and pH imaging with this miniaturized system was demonstrated.
In this contribution, we focus on the detection of toxic gases with living eukaryotic cells. A cell-based gas sensor system, able to measure the effects of direct exposure of gases to cells in real-time, was set up. Impedance data as well as oxygen consumption of Chinese hamster lung fibroblast cells (V79) were analysed upon exposure to carbon monoxide (CO). The CO (diluted in wet synthetic air) affects the cell respiration as indicated by an attenuated respiration signal after the CO exposure as well as an instant increase of the capacitive part of the impedance signal during the gas exposure.
Es wurde ein automatisiertes, computerunterstütztes Testsystem für die Funktionsprüfung und Charakterisierung von (bio-)chemischen Sensoren auf Waferebene entwickelt und in einen konventionellen Spitzenmessplatz integriert. Das System ermöglicht die Charakterisierung und Identifizierung „funktionstauglicher“ Sensoren bereits auf Waferebene zwischen den einzelnen Herstellungsschritten, wodurch weitere, bisher übliche Verarbeitungsschritte wie das Fixieren, Bonden und Verkapseln für die defekten oder nicht funktionstauglichen Sensorstrukturen entfällt. Außerdem bietet eine speziell entworfene miniaturisierte Durchflussmesszelle die Möglichkeit, bereits auf Waferlevel die Sensitivität, Drift, Hysterese und Ansprechzeit der (bio-)chemischen Sensoren zu charakterisieren. Das System wurde exemplarisch mit kapazitiven, pH-sensitiven EIS- (Elektrolyt-Isolator-Silizium) Strukturen und ISFET- (ionensensitiver Feldeffekttransistor) Strukturen mit verschiedenen Geometrien und Gate-Layouts getestet.
Realization of a calorimetric gas sensor on polyimide foil for applications in aseptic food industry
(2010)
A calorimetric gas sensor is presented for the monitoring of gas-phase H2O2 at elevated temperature during sterilization processes in aseptic food industry. The sensor consists of two temperature-sensitive thin-film resistances built up on a polyimide foil with a thickness of 25 μm, which are passivated with a layer of SU-8 photo resist and catalytically activated with manganese(IV) oxide. Instead of an active heating structure, the calorimetric sensor utilizes the elevated temperature of an evaporated H2O2 aerosol. In an experimental set-up, the sensor has shown a sensitivity of 4.78 °C/(%v/v) in a H2O2 concentration range of 0 to 10% v/v at an evaporation temperature of 240 ∘C. Furthermore, the sensor possesses the same, unchanged sensor signal even at varied evaporation temperatures of the gas stream. The sensor characterization demonstrates the suitability of the calorimetric gas sensor for monitoring the efficiency of sterilization processes.
Chemical imaging systems allow the visualisation of the distribution of chemical species on the sensor surface. This work represents a new flexible approach of read out in a light-addressable potentiometric sensor (LAPS) with the help of a digital light processing (DLP) set-up. The DLP, known well for video projectors, consists of a mirror-array MEMS device which allows fast and flexible generation of light patterns. With the help of these light patterns the sensor surface of the LAPS device can be read out sequentially in a raster like scheme (scanning LAPS). The DLP approach has several advantages compared to conventional scanning LAPS set-ups, e.g., the spot size, the shape and the intensity of the light pointer can be changed easily and no mechanical movement is necessary, which reduces the size of the set-up and increases the stability and speed of measurement.
In aseptischen Abfüllsystemen wird Wasserstoffperoxid in der Gasphase aufgrund der stark oxidativen Wirkung zur Packstoffentkeimung eingesetzt. Dabei wird die Effizienz der Entkeimung im Wesentlichen von der vorliegenden H2O2-Konzentration im Packstoff bestimmt. Zur Inline-Überwachung der H2O2-Konzentration wurde ein kalorimetrischer Gassensor auf Basis einer flexiblen Polyimidfolie aus temperatursensitiven Dünnschicht-Widerständen und Mangan(IV)-oxid als katalytische Transducerschicht realisiert. Der Sensor weist ein lineares Ansprechverhalten mit einer Sensitivität von 7,15 °C/Vol.-% in einem H2O2-Konzentrationsbereich von 0 bis 8 Vol.-% auf. Weiterhin wurde zur Auslesung des Sensorsignals eine RFID-Elektronik, bestehend aus einem Sensor-Tag und einer Sende-/Empfangseinheit ausgelegt, sowie eine Abfolge des Messzyklus aufgestellt. Im weiteren Verlauf soll der kalorimetrische Gassensor mit der RFID-Elektronik gekoppelt und in eine Testverpackung zur Inline-Überwachung der H2O2-Konzentration in aseptischen Abfüllsystemen implementiert werden.
Ein lichtadressierbarer potentiometrischer Sensor (LAPS) kann die Konzentration eines oder mehrerer Analyten ortsaufgelöst auf der Sensoroberfläche nachweisen. Dazu wird mit einer modulierten Lichtquelle die Halbleiterstruktur des zu untersuchenden Bereiches angeregt und ein entsprechender Photostrom ausgelesen. Durch gleichzeitige Anregung mehrere Bereiche durch Lichtquellen mit unterschiedlichen Modulationsfrequenzen können diese auch zeitgleich ausgelesen werden. Mit der neuen, hier vorgestellten Ansteuerungselektronik integriert in einem "Field Programmable Gate Array" (FPGA) ist es möglich, mehrere Leuchtquellen gleichzeitig mit unterschiedlichen, während der Laufzeit festlegbaren Frequenzen, Phasen und Lichtintensitäten zu betreiben. Somit kann das Frequenzverhalten des Sensors untersucht und die Konzentration des Analyten über das Oberflächenpotential mit Hilfe von Strom/Spannungs-Kurven und Phase/Spannungs-Kurven bestimmt werden.
Chalcogenide glass materials as membranes for potentiometric sensors for chemical analysis in solutions have been studied since more than 20 years. In this work, an electrolyte–insulator–semiconductor structure was combined with chalcogenide glass membranes prepared by means of the pulsed laser deposition technique. Depending on the membrane composition a selectivity to different ions (Cd2+ and Pb2+) is achieved. The different sensor membranes have been physically characterised using microscopy, ellipsometry, profilometry, atomic force microscopy (AFM), scanning electron microscopy (SEM) and Rutherford backscattering spectrometry (RBS). The electrochemical behaviour has been investigated via capacitance/voltage (C/V) and constant capacitance (ConCap) measurements and results in a Cd2+ sensitivity of 23.1 ± 0.6 mV per decade in a linear range from 7 × 10−6 to 10−2 mol/l and 24.4 ± 0.5 mV per decade in a linear range from 5 × 10−6 to 10−2 mol/l for Pb2+, respectively.
A light-addressable potentiometric sensor (LAPS) can measure the concentration of one or several analytes at the sensor surface simultaneously in a spatially resolved manner. A modulated light pointer stimulates the semiconductor structure at the area of interest and a responding photocurrent can be read out. By simultaneous stimulation of several areas with light pointers of different modulation frequencies, the read out can be performed at the same time. With the new proposed controller electronic based on a field-programmable gate array (FPGA), it is possible to control the modulation frequencies, phase shifts, and light brightness of multiple light pointers independently and simultaneously. Thus, it is possible to investigate the frequency response of the sensor, and to examine the analyte concentration by the determination of the surface potential with the help of current/voltage curves and phase/voltage curves. Additionally, the ability to individually change the light intensities of each light pointer is used to perform signal correction.
Chemical imaging systems allow the visualisation of the distribution of chemical species on the sensor surface. This work represents a new flexible approach to read out light-addressable potentiometric sensors (LAPS) with the help of a digital light processing (DLP) set-up. The DLP, known well for video projectors, consists of a mirror-array MEMS device, which allows fast and flexible generation of light patterns. With the help of these light patterns, the sensor surface of the LAPS device can be addressed. The DLP approach has several advantages compared to conventional LAPS set-ups, e.g., the spot size and the shape of the light pointer can be changed easily and no mechanical movement is necessary, which reduces the size of the set-up and increases the stability and speed of the measurement. In addition, the modulation frequency and intensity of the light beam are important parameters of the LAPS set-up. Within this work, the authors will discuss two different ways of light modulation by the DLP set-up, investigate the influence of different modulation frequencies and different light intensities as well as demonstrate the scanning capabilities of the new set-up by pH mapping on the sensor surface.
A new approach for a label-free electrical detection of DNA hybridization and denaturation using an array of individually addressable field-effect nanoplate SOI (silicon-on-insulator) capacitors functionalized with gold nanoparticles is presented. By using a constant-capacitance measuring setup in a differential mode, signal changes of ∼110 mV and ∼70 mV have been registered after the DNA hybridization and denaturation events, respectively.
The development of new interfaces for (bio-)chemical sensors requires comprehensive analyses and testing. The light-addressable potentiometric sensor (LAPS) can be used as a platform to investigate the sensitivity of a newly developed interface towards (bio-)chemical agents. LAPS measurements are spatially resolved by utilisation of focused light beams to define individual measurement spots. In this work, a new digitally modulated LAPS set-up based on an FPGA design will be introduced to increase the number of measurement spots, to shorten the measurement time and to improve the measurement accuracy.