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Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.
Gute Chancen im Maschinenbau
(2002)
Gute Chancen im Maschinenbau
(2002)
Chancen im Maschinenbau
(2002)
Aachen: Colourdome
(2002)
Pro-Forma-Angaben
(2002)
We are developing an X-ray computed tomography (CT) system which will be combined with a high resolution animal PET system. This permits acquisition of both molecular and anatomical images in a single machine. In particular the CT will also be utilized for the quantification of the animal PET data by providing accurate data for attenuation correction. A first prototype has been built using a commercially available plane silicon diode detector. A cone-beam reconstruction provides the images using the Feldkamp algorithm. First measurements with this system have been performed on a mouse. It could be shown that the CT setup fulfils all demands for a high quality image of the skeleton of the mouse. It is also suited for soft tissue measurements. To improve contrast and resolution and to acquire the X-ray energy further development of the system, especially the use of semiconductor detectors and iterative reconstruction algorithms are planned.