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Klaus Prume (6)
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2007 (6)
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Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan
(2007)
Klaus Prume
;
Paul Muralt
;
Florian Calame
;
Thorsten Schmitz-Kempen
A simple and powerful analytical model for MEMS piezoelectric multimorphs / Booij, W. E. ; Vogl, A. H. ; Wang, D. T. ; Tyholdt, F. ; Ostbo, N. P. ; Raeder, H. ; Prume, K.
(2007)
Klaus Prume
;
W. E. Booij
;
A. H. Vogl
;
D. T. Wang
Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application / Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.;
(2007)
Klaus Prume
Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;
(2007)
Klaus Prume
;
P. Muralt
;
F. Calame
;
T. Schmitz-Kempen
Chemically derived seeding layer for {100}-textured PZT thin films / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P.
(2007)
Klaus Prume
;
F. Tyholdt
;
F. Calame
;
H. Raeder
Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.
(2007)
Klaus Prume
;
H. Raeder
;
F. Tyholdt
;
W. E. Booij
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