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F. Tyholdt (2)
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Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.
(2007)
Klaus Prume
;
H. Raeder
;
F. Tyholdt
;
W. E. Booij
Chemically derived seeding layer for {100}-textured PZT thin films / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P.
(2007)
Klaus Prume
;
F. Tyholdt
;
F. Calame
;
H. Raeder
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