Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan
Author: | Klaus Prume, Paul Muralt, Florian Calame, Thorsten Schmitz-Kempen |
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ISBN: | 1385-3449 |
Parent Title (English): | Journal of Electroceramics. 19 (2007), H. 4 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2007 |
First Page: | 407 |
Last Page: | 411 |
Link: | http://dx.doi.org/10.1007/s10832-007-9065-y |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |