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pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique

  • pH-sensitive properties of barium strontium titanate (BST) high-k thin films as alternative gate material for field-effect capacitive (bio-)chemical sensors based on an electrolyte-insulator-semiconductor system have been investigated. The BST films of different compositions (Ba0.31Sr0.69TiO3, Ba0.25Sr0.75TiO3 and Mg-doped Ba0.8Sr0.2Mg0.1Ti0.9O3) were deposited by pulsed laser deposition technique from targets fabricated by self-propagating high-temperature synthesis. The realised sensors have been electrochemically characterised by means of impedance-spectroscopy, capacitance–voltage and constant-capacitance method. The sensors possess a Nernstian-like pH sensitivity in the concentration range between pH 3 and 11 with a response time of 5–10 s. An equivalent circuit model for the BST-based capacitive field-effect sensor is discussed.

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Metadaten
Author:Vahe V. Buniatyan, Maryam H. Abouzar, Norayr W. Martirosyan, Jürgen Schubert, Spartak Gevorgian, Michael Josef SchöningORCiD, Arshak PoghossianORCiD
DOI:https://doi.org/10.1002/pssa.200983310
ISSN:1862-6300
Parent Title (English):Physica Status Solidi (A)
Publisher:Wiley-VCH
Place of publication:Berlin
Document Type:Article
Language:English
Year of Completion:2010
Date of the Publication (Server):2012/12/18
Volume:207
Issue:4
First Page:824
Last Page:830
Note:
Special Issue: Engineering of Functional Interfaces EnFI 2009
Link:https://doi.org/10.1002/pssa.200983310
Zugriffsart:campus
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik
FH Aachen / INB - Institut für Nano- und Biotechnologien
collections:Verlag / Wiley-VCH