Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;
Author: | Klaus Prume, Paul Muralt, Florian Calame, Thorsten Schmitz-Kempen, Stephan Tiedke |
---|---|
ISBN: | 0885-3010 |
Parent Title (English): | IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2007 |
First Page: | 81 |
Last Page: | 14 |
Link: | http://dx.doi.org/10.1109/TUFFC.2007.206 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |