Field-effect nanoplate capacitive pH sensor based on SOI structure
Author: | Maryam H. Abouzar, S. Ingebrandt, Arshak PoghossianORCiD, Y. Zhang, W. Moritz, Michael Josef SchöningORCiD |
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Parent Title (English): | Semiconductor micro- and nanoelectronics : Proceedings of the Seventh International Conference , Tsakhcadzor, Armenia July 3-5 2009 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2009 |
First Page: | 55 |
Last Page: | 58 |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien |