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Investigations on porous silicon layers with regard to chemical microsensor applications

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Metadaten
Author:Michael J. Schöning, M. Crott, F. Ronkel, M. Thust, J. W. Schultze, P. Kordos, H. Lüth
ISBN:0819421650
Parent Title (English):Third International Conference on Intelligent Materials : Lyon, 3-4-5 June 1996, Center of Congress "L'Espace Tête d'Or" / [publ. by SPIE, the International Society for Optical Engineering]. General chair/ed. by: P. F. Gobin
Publisher:SPIE
Place of publication:Bellingham, Wash.
Document Type:Article
Language:English
Year of Completion:1996
Date of the Publication (Server):2012/12/18
Length:XVIII, 1022 S.: Ill.
First Page:275
Last Page:280
Note:
International Conference on Intelligent Materials ; (3, 1996, Lyon)
Institutes:FH Aachen / Fachbereich Medizintechnik und Technomathematik