Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size / Prume, K. ; Gerber, P. ; Kügeler, C. ; Roelofs, A. ; Böttger, U. ; Waser, R. ; Schmitz-Kempen,
Author: | Klaus Prume, Peter Gerber, Carsten Kügeler, Andreas Roelofs |
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ISBN: | 0-7803-8410-5 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2004 |
First Page: | 7 |
Last Page: | 10 |
Note: | 14th IEEE International Symposium on Applications of Ferroelectrics, 2004. ISAF-04. 2004 |
Link: | http://dx.doi.org/10.1109/ISAF.2004.1418325 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |