pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique
- pH-sensitive properties of barium strontium titanate (BST) high-k thin films as alternative gate material for field-effect capacitive (bio-)chemical sensors based on an electrolyte-insulator-semiconductor system have been investigated. The BST films of different compositions (Ba0.31Sr0.69TiO3, Ba0.25Sr0.75TiO3 and Mg-doped Ba0.8Sr0.2Mg0.1Ti0.9O3) were deposited by pulsed laser deposition technique from targets fabricated by self-propagating high-temperature synthesis. The realised sensors have been electrochemically characterised by means of impedance-spectroscopy, capacitance–voltage and constant-capacitance method. The sensors possess a Nernstian-like pH sensitivity in the concentration range between pH 3 and 11 with a response time of 5–10 s. An equivalent circuit model for the BST-based capacitive field-effect sensor is discussed.
Verfasserangaben: | Vahe V. Buniatyan, Maryam H. Abouzar, Norayr W. Martirosyan, Jürgen Schubert, Spartak Gevorgian, Michael Josef SchöningORCiD, Arshak PoghossianORCiD |
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DOI: | https://doi.org/10.1002/pssa.200983310 |
ISSN: | 1862-6300 |
Titel des übergeordneten Werkes (Englisch): | Physica Status Solidi (A) |
Verlag: | Wiley-VCH |
Verlagsort: | Berlin |
Dokumentart: | Wissenschaftlicher Artikel |
Sprache: | Englisch |
Erscheinungsjahr: | 2010 |
Datum der Publikation (Server): | 18.12.2012 |
Jahrgang: | 207 |
Ausgabe / Heft: | 4 |
Erste Seite: | 824 |
Letzte Seite: | 830 |
Bemerkung: | Special Issue: Engineering of Functional Interfaces EnFI 2009 |
Link: | https://doi.org/10.1002/pssa.200983310 |
Zugriffsart: | campus |
Fachbereiche und Einrichtungen: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien | |
collections: | Verlag / Wiley-VCH |